Azenta had nine patents in robotics during Q1 2024. Azenta Inc filed patents for substrate transport apparatus with motion compensation, a frame with independently controllable motors for substrate transport arms, a transport apparatus with a closed magnetic flux circuit, and a method for inspecting inner and outer pods of an EUV pod using line scan and area scan cameras. GlobalData’s report on Azenta gives a 360-degree view of the company including its patenting strategy. Buy the report here.

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Azenta grant share with robotics as a theme is 11% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Automatic wafer centering method and apparatus (Patent ID: US20240087938A1)

The patent filed by Azenta Inc. describes a substrate transport apparatus that includes a robot arm with an end effector for supporting a substrate, an imaging system with a camera to capture images of the robot arm, and a controller to calculate positional variances of the robot arm and adjust its motion compensation factor accordingly. The controller captures images of the robot arm moving to a repeatable position, calculates positional variances by comparing these images with calibration images, and determines motion compensation factors to change the extended position of the robot arm. This system allows for precise control and adjustment of the robot arm's movements based on captured images rather than encoder data, ensuring accurate substrate handling within the transport apparatus.

The apparatus also includes features such as substrate eccentricity determination, thermal change compensation, and calibration image generation based on design information. The method involves capturing images of the robot arm in different positions, calculating positional variances, and adjusting the motion compensation factor accordingly. By utilizing images and calibration data, the system can effectively compensate for variations in the robot arm's position and ensure precise substrate handling. This innovative approach to motion control in substrate transport systems enhances accuracy and reliability, making it suitable for applications requiring high precision in substrate manipulation.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.